Box-Type Vacuum Atmosphere Furnace

Technical overview

Designed around the complete thermal process.

Box-Type Vacuum Atmosphere Furnace is a HuanYu atmosphere furnaces system for protected-gas sintering, reduction, annealing, atmosphere heat treatment. Published configuration references include 1500 / 1400 °C configurations and Vacuum / controlled atmosphere. Final selection depends on the material, workload, process window and selected configuration.

Key technical facts

• +Temperature reference: 1500 / 1400 °C configurations
• +Environment reference: Vacuum / controlled atmosphere
• +I. Equipment Overview JZQL1500-64L is a box-type closed vacuum atmosphere heat treatment furnace, which adopts three-sided radiation heating of silicon carbon rods, can be used for vacuum and inert atmosphere, and is suitable for powder sintering, reduction, glue removal, CVD, high-temperature annealing and other processes. It is widely used in university laboratories, lithium batteries, ceramics, semiconductors, and new material enterprises for sample research and development and small batch production. 2. The temperature index of the core technical parameters is high 1500 ℃, long-term stable use ≤ 1400 ℃; furnace size 400 × 400 × 400mm, single temperature zone; S-type platinum-rhodium thermocouple temperature measurement, temperature control accuracy ± 1 ℃; heating rate 1 ~ 20 ℃/min adjustable, total heating power 15kW. Vacuum and gas circuit mechanical pump limit vacuum - 0.1MPa; inert gases such as nitrogen and argon can be introduced, equipped with a float flow meter to accurately control the flow; with adjustable mechanical pressure relief and explosion-proof device to ensure stable pressure in the furnace. Power supply and water-cooled three-phase 380V five-wire system; the furnace door is equipped with a circulating water-cooling sleeve, and the sealing silicone pad is continuously cooled to extend the service life of the seal. Control system YuDian smart meter, supports 30 programmable heating and cooling curves, PID self-tuning, SCR voltage regulation, manual/automatic dual-mode operation. Third, the structure of the whole machine features a double-layer air-cooled furnace body carbon steel paint shell, interlayer air-cooled heat dissipation, the outer surface temperature of the furnace body is less than 60° C, and the heat-insulating fireblock bricks block the high temperature of the furnace opening.
• +Operation. High-temperature insulation furnace 1600 high-purity alumina polycrystalline fiber splicing furnace, high-temperature coating on the inner wall, step sealing and fireproofing, small heat storage, fast heating and cooling, and energy saving. The high sealing water-cooled furnace door integrally seals the welding cavity, and the water-cooled silicone sealing structure of the furnace door has excellent air tightness, which can be replaced by vacuum for many times to reduce the oxygen content in the furnace. The complete gas vacuum system is equipped with a rotary vane mechanical pump and a vacuum baffle valve; independent air intake and exhaust pipelines, needle valves + flow meters accurately regulate gas flow, and exhaust gases are discharged centrally. Multiple interlocks integrate over-temperature, broken coupling, over-current, and over-pressure acousto-optic alarms, automatically relieve pressure exceeding the standard, and automatically disconnect the heating power supply from the fault. Fourth, the advantages of the product are surrounded by heating, the furnace temperature field is uniform, and the heat treatment of the whole batch of materials is consistent; the vacuum/atmosphere integration can be vacuumed to remove impurities and then protect the gas to avoid high-temperature oxidation of the workpiece; the automatic multi-stage program, the entire process is unattended, and the experimental data is highly repeatable; the sealing and water-cooling design take into account long-term atmospheric conditions, and the seal loss is low; modular electronic control, standardized accessories, and daily maintenance and replacement of consumables are simple. 5. Applicable processes and materials: lithium battery cathode powder, new ceramics, nanomaterials, semiconductor substrates, refractory materials; experiments such as atmospheric sintering, hydrogen reduction, powder gluing, CVD film preparation, metal annealing, and high-temperature roasting can be completed. 6. After-sales explanation: The warranty of the whole machine is 12 months.